Screen Printing Silver Shielded ITO-In2O3 Thin-Film Thermocouples for Electromagnetic Interference Reduction

被引：0

作者：

Li, Shuimin ^{[1
]}

Zhang, Zhongkai ^{[1
]}

Lei, Jiaming ^{[1
]}

Liu, Zhaojun ^{[1
]}

Liu, Jiangjiang ^{[1
]}

Wang, Meng ^{[1
]}

Tan, Qing ^{[2
]}

Qi, Rui ^{[2
]}

Tian, Bian ^{[1
,3
]}

机构：

[1] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China

[2] CISDI Res & Dev Co Ltd, Nano & New Mat Res Div, Chongqing 401122, Peoples R China

[3] Shandong Lab Yantai Adv Mat & Green Mfg, Yantai 265503, Peoples R China

来源：

IEEE SENSORS LETTERS | 2024年 / 8卷 / 08期

关键词：

Thermal sensors; electromagnetic shielding; temperature sensors; thin-film thermocouple (TFTC);

D O I：

10.1109/LSENS.2024.3423834

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin-film thermocouples (TFTC) have been extensively studied for their wide range of applications in various environments. However, TFTC faces challenges in electromagnetic environments as they can generate AC interference voltage. In this study, we introduce a thermocouple temperature sensor shielded by silver (Ag) thin film on both sides of aluminum oxide (Al2O3) substrate. The high conductivity of Ag film (11.48 m Omega/square) helps reduce interference caused by alternating current, resulting in a superior electromagnetic shielding effectiveness of 43.68 dB. The temperature sensitivity coefficient of this sensor is 20.87 mu V/degrees C at a hot end temperature of 318.44 degree celsius. These shielded TFTC temperature sensors show great potential for applications in aerospace, iron and steel metallurgy, and other industries.

引用

页数：4

共 15 条

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