共 50 条
- [2] Intelligent, Data-Driven Approach to Sustainable Semiconductor Manufacturing 6TH IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2022), 2022, : 1 - 5
- [3] Data-Driven Modelling and Robust Control of a Semiconductor Manufacturing Process IFAC PAPERSONLINE, 2023, 56 (02): : 4234 - 4239
- [6] WORK-IN-PROCESS BALANCING CONTROL IN GLOBAL FAB SCHEDULING FOR SEMICONDUCTOR MANUFACTURING 2019 WINTER SIMULATION CONFERENCE (WSC), 2019, : 2257 - 2268
- [8] Data Analytics for Manufacturing Systems A Data-Driven Approach for Process Optimization 52ND CIRP CONFERENCE ON MANUFACTURING SYSTEMS (CMS), 2019, 81 : 369 - 374
- [10] A Data-Driven Holistic Approach to Fault Prognostics in a Cyclic Manufacturing Process MANUFACTURING SYSTEMS 4.0, 2017, 63 : 664 - 669