Synthesis and characteristics of a monocrystalline GaAs/ fl-Ga 2 O 3 p-n heterojunction

被引:7
|
作者
Zhou, Jie [1 ]
Gong, Jiarui [1 ]
Sheikhi, Moheb [1 ]
Dheenan, Ashok [2 ]
Wang, Qingxiao [4 ]
Abbasi, Haris [1 ]
Liu, Yang [1 ]
Adamo, Carolina [3 ]
Marshall, Patrick [3 ]
Wriedt, Nathan [2 ]
Cheung, Clincy [3 ]
Li, Yiran [1 ]
Qiu, Shuoyang [1 ]
Li, Xiaohang [4 ]
Ng, Tien Khee [4 ]
Gan, Qiaoqiang [4 ]
Gambin, Vincent [3 ]
Ooi, Boon S. [4 ]
Rajan, Siddharth [2 ]
Ma, Zhenqiang [1 ]
机构
[1] Univ Wisconsin Madison, Dept Elect & Comp Engn, Madison, WI 53706 USA
[2] Ohio State Univ, Dept Elect & Comp Engn, Columbus, OH 43210 USA
[3] Northrop Grumman Corp, Redondo Beach, CA 90278 USA
[4] King Abdullah Univ Sci & Technol, Dept Elect & Comp Engn, Thuwal 23955, Saudi Arabia
关键词
Semiconductor grafting; Heterojunction; Gallium oxide; Gallium arsenide nanomembrane; Transfer printing;
D O I
10.1016/j.apsusc.2024.160176
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Beta phase -gallium oxide (fl-Ga 2 O 3 ) is an emerging ultrawide bandgap semiconductor but lacks efficient p -type doping, which hinders development of high-performance bipolar heterojunction devices. This study introduces the synthesis and characterization of a monocrystalline GaAs/fl-Ga 2 O 3 p -n heterojunction, employing advanced semiconductor grafting technology. The heterojunction was innovatively fabricated by grafting a p -type GaAs single crystal nanomembrane to an Al 2 O 3 -coated n -type fl-Ga 2 O 3 epitaxial substrate. The synthesized heterojunction was comprehensively characterized. The band alignment of grafted GaAs/fl-Ga 2 O 3 p -n heterojunction was experimentally constructed through X-ray photoelectron spectroscopy (XPS), and the result is in accordance with the theorical prediction based on the electron affinity rule. The resulting GaAs/fl-Ga 2 O 3 p -n diodes built on this heterojunction exhibit remarkable performance metrics, including an ideality factor of 1.23, a high rectification ratio of 8.04 x 10 9 at +/- 4 V, and a turn on voltage at 2.35 V. Furthermore, at + 5 V, the diode displays a large current density of 2500 A/cm 2 along with a low ON resistance of 2 m Omega center dot cm 2 . This study marks the first successful demonstration of a high -quality grafted GaAs/fl-Ga 2 O 3 p -n heterojunction, establishing a critical building block for the further development of bipolar Ga 2 O 3 -based device applications such as diodes, transistors, and thyristors.
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页数:8
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