[1] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310058, Peoples R China
[2] ZJU Hangzhou Global Sci & Technol Innovat Ctr, Inst Adv Semicond, Hangzhou 311200, Peoples R China
[3] ZJU Hangzhou Global Sci Technol Innovat Ctr, Zhejiang Prov Key Lab Power Semicond Mat & Devices, Hangzhou 311200, Peoples R China
[4] Zhejiang Univ, Dept Informat Sci & Elect Engn, Hangzhou 310027, Peoples R China
[5] Zhejiang Univ, Zhejiang Key Lab Adv Solid State Energy Storage Te, Taizhou Inst, Taizhou 318000, Zhejiang, Peoples R China