Determination of trace impurities in EG-quality orthophosphoric(V) acid by ICP-MS

被引：0

作者：

Milde, Anna ^{[1
]}

Stypka, Mariusz ^{[1
]}

机构：

[1] Alventa SA, Ul Karola Olszewskiego 25, PL-32566 Alwernia, Poland

来源：

PRZEMYSL CHEMICZNY | 2024年 / 103卷 / 04期

关键词：

orthophosphoric acid; ICP-MS; trace impurities; electronic grade (EG);

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A multi-element method for analyzing trace amts. of elements in concd. EP-grade H3PO4 by ICP-MS spectrometry was developed. Validation criteria were defined and the method was validated. Very good linearity (r > 0.999) and limits of quantification at 10 ppb were obtained for all elements detd. The method can be used for qual. control of concd. H3PO4 .

引用

页码：545 / 548

页数：128