High-Sensitivity of Self-Powered Gas Sensors Based on Piezoelectric Nanogenerators With Y-Doped 1-D ZnO Nanostructures

被引:6
作者
Chu, Yen-Lin [1 ,2 ]
Ji, Liang-Wen [2 ]
Xie, Jun-Hong [3 ]
Chu, Tung-Te [4 ]
机构
[1] Adv Semicond Engn Inc, Dept Cent Engn, Kaohsiung 811, Taiwan
[2] Natl Formosa Univ, Inst Electroopt & Mat Sci, Yunlin 632, Taiwan
[3] EPISTAR Corp Inc, Dept Res & Dev Ctr, Hsinchu 300, Taiwan
[4] Kao Yuan Univ, Dept Mech & Automat Engn, Kaohsiung 821, Taiwan
关键词
Zinc oxide; II-VI semiconductor materials; Sensors; Gas detectors; Nanostructures; Zinc; Electrodes; 1-D nanorods (NRs); carbon monoxide (CO) gas; hydrothermal route; piezoelectric nanogenerator (PENG); yttrium dopant (Y-doped); zinc oxide (ZnO); CARBON-MONOXIDE; OPTICAL-PROPERTIES; CO; NANORODS; GROWTH; TRANSPARENT; PERFORMANCE; DRIVEN;
D O I
10.1109/JSEN.2024.3389931
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, yttrium-doped zinc oxide (Y-doped ZnO) nanorod (NR) arrays were grown using a simple facile hydrothermal solution route at low temperature to fabricate a self-powered gas sensor based on piezoelectric nanogenerator (PENG). The material properties of the 1-D NR arrays were observed using a field-emission scanning electron microscopy (FE-SEM) with an energy-dispersive X-ray (EDX), an X-ray diffraction (XRD), and a high-resolution transmission electron microscope (HR-TEM). The Y-doping concentration in the ZnO NRs was estimated to be 0.96 at%. Photoluminescence (PL) analysis was used to analyze the distribution of oxygen defects in the nanostructures. The Y-doped ZnO NRs were grown onto the bottom substrate and indium-tin-oxide polyethylene terephthalate (ITO-PET) substrates with silver (Ag) electrode were used as the top electrode to fabricate the PENG device. By introducing regular frequency mechanical external forces through a home-made impact system, the ZnO NRs of PENG devices generate piezoelectric effects, then the output electrical characteristics of PENGs were measured. It can be seen that the NRs with a Y-doping concentration of 7.5 mM showed a significant change in output voltage and current when exposed to carbon monoxide (CO) gas. Meanwhile, the Y:ZnO PENGs revealed remarkable sensitivity (58%) in 150 ppm CO environment. As a result, it was seen that such a device exhibited a self-powering characteristic and a significant sensitivity to CO gas. In the future, the device can also be combined with the Internet of Things (IoTs) for CO gas detection (e.g., portable gas sensors).
引用
收藏
页码:18731 / 18739
页数:9
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