Differential Confocal Axial Range Expansion Method Based on Double Fuzzy

被引：0

作者：

Yuan, Tao ^{[1
]}

Yi, Dingrong ^{[1
]}

Jiang, Wei ^{[2
]}

Ye, Yiqing ^{[2
]}

Wu, Dongliang ^{[1
]}

Liu, Ting ^{[1
]}

机构：

[1] Huaqiao Univ, Sch Mechatron & Automat, Xiamen 361021, Peoples R China

[2] Quanzhou Normal Univ, Sch Phys & Informat Engn, Quanzhou 362046, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2024年 / 24卷 / 03期

基金：

中国国家自然科学基金;

关键词：

Semiconductor device measurement; Position measurement; Microscopy; Three-dimensional displays; Sensors; Dispersion; Imaging; Axial range expansion; differential confocal; double fuzzy; layer scanning; reference plane;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Aiming at the problem of limited axial range of differential confocal microscopy (DCM) 3-D measurement method, this study proposes a method to expand the range of DCM (differential confocal axial range expansion method based on double fuzzy, DFDCM). The DFDCM enables range expansion by combining layer scanning with DCM. The problem of effective data fusion in each DCM is solved by using double fuzzy ranging. Then, since only three images are required in each DCM, i.e., pre-focus image, reference plane image, and post-focus image, DFDCM can be well adapted to most DCMs. Quantitative evaluation experiments using the parallel object DCM system show that DFDCM can effectively extend the measurement range of DCM. Under a 10x /0.25 objective, the axial distance between two adjacent reference surfaces is 14 mu m . In the experiment of step measurement of 28.91 mu m , the measurement error is 0.392 mu m and the error rate is 1.34%.

引用

页码：3568 / 3573

页数：6

共 17 条

[1] Cement paste surface roughness analysis using coherence scanning interferometry and confocal microscopy [J].

Apedo, K. L. ;

Munzer, C. ;

He, H. ;

Montgomery, P. ;

Serres, N. ;

Fond, C. ;

Feugeas, F. .

MATERIALS CHARACTERIZATION, 2015, 100 :108-119

[2] A COMPUTATIONAL APPROACH TO EDGE-DETECTION [J].

CANNY, J .

IEEE TRANSACTIONS ON PATTERN ANALYSIS AND MACHINE INTELLIGENCE, 1986, 8 (06) :679-698

[3] Design of adjustable dispersive objective lens for chromatic confocal system [J].

Cui C.-C. ;

Li H. ;

Yu Q. ;

Ye R.-F. .

Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 25 (04) :875-883

[4] Chromatic confocal microscopy using liquid crystal display panels [J].

Cui, Qi ;

Liang, Rongguang .

APPLIED OPTICS, 2019, 58 (08) :2085-2090

[5] Peripheral hypertrophic subepithelial corneal degeneration: clinical aspects related to in vivo confocal microscopy and optical coherence tomography [J].

Gunzinger, Jeanne Martine ;

Voulgari, Nafsika ;

Petrovic, Aleksandra ;

Hashemi, Kattayoon ;

Kymionis, Georgios .

INTERNATIONAL MEDICAL CASE REPORTS JOURNAL, 2019, 12 :237-241

[6]

[蒋威 Jiang Wei], 2019, [仪器仪表学报, Chinese Journal of Scientific Instrument], V40, P140

[7] Three-dimensional confocal reflectance microscopy for surface metrology [J].

Kim, Chang-Soo ;

Yoo, Hongki .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2021, 32 (10)

[8] MicroLED chromatic confocal microscope [J].

Li, Shaobai ;

Song, Bofan ;

Peterson, Tyler ;

Hsu, Jian ;

Liang, Rongguang .

OPTICS LETTERS, 2021, 46 (11) :2722-2725

[9]

Liu Qian, 2013, Optics and Precision Engineering, V21, P2473, DOI 10.3788/OPE.20132110.2473

[10] Effective metrology and standard of the surface roughness of micro/nanoscale waveguides with confocal laser scanning microscopy [J].

Sun, DeGui ;

Shang, Hongpeng ;

Jiang, Huilin .

OPTICS LETTERS, 2019, 44 (04) :747-750

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