SPECIAL DESIGN OF MAGNETIC ANALYZER FOR 400 keV ION IMPLANTER

被引：0
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作者：
王克明
刘清前
张乃健
陈鄂生
张永恩
机构：
[1] Department of Physics
[2] Shandong University
[3] Jinan
[4] PRC
[5] Jinan
来源：
ScienceinChina,SerA. | 1990年 / Ser.A.1990卷 / 06期
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摘要：
<正> The special design of magnetic analyzer for a 400 keV ion implanter is described. An asymmetric double-focusing condition is used in the design. The transverse object point is real and the vertical object is virtual. The electrostatic doublet is taken to realize the beam optics matching between the ion source, initial focusing system and magnetic analyzer. By this design the magnetic analyzer has been cut in size, and the mass resolution enhanced. The desired mass resolution equals 200, such that six mercury isotopes can be separated. The measured results for the mass resolution is in good agreement with the calculated values. This manifests the successful theoretical calculation.
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页码：738 / 746
页数：9
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