Multi-field coupled nonlinear vibration analysis of micro resonant gas sensors

被引：0
|
作者：
Fu X. [1 ]
Dang Y. [1 ]
Xu L. [1 ]
机构：
[1] School of Mechanical Engineering, Yanshan University, Qinhuangdao
来源：
Zhendong yu Chongji/Journal of Vibration and Shock | 2019年 / 38卷 / 02期
关键词：
Micro-electro-mechanical system(MEMS); Molecular force; Multi-field coupled vibration; Nonlinear vibration;
D O I：
10.13465/j.cnki.jvs.2019.02.012
中图分类号：
学科分类号：
摘要：
With the decrease of resonator size, the effects of molecular force etc. on the resonator behaviors become more obvious. The resonator of micro gas sensors usually operates in an environment of multi-field coupled interaction. In consideration of the factors of molecular force, thermal stress and density of gas, a multi-field coupled dynamic equation of the resonator was derived. Using the multi-scale method, the natural frequency and instant frequency of the sensor were obtained. The changes of the natural frequency of the sensor along with the variations of molecular force, gas density and temperature were investigated, the influences of system parameters on the time domain dynamic responses were analyzed. With a self-manufactured micro resonant gas sensor and its detecting system, the natural frequency was tested, which is in agreement with the calculated value. The correctness of the theoretical analysis was thus validated. The research results have guiding significance for the further miniaturization of such sensors. © 2019, Editorial Office of Journal of Vibration and Shock. All right reserved.
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页码：75 / 81
页数：6
相关论文
共 17 条
  • [1] Thielicke E., Obermeier E., Microactuators and their technologies, Mechatronics, 10, 4-5, pp. 431-455, (2000)
  • [2] Rafael N.G., Anna M.B., Alfons D., AC transfer function of electrostatic capacitive sensors based on the 1D equivalent model: application to silicon microphones, Journal of Microelectromechanical Systems, 12, 6, pp. 972-978, (2003)
  • [3] Zhou S., Gas sensor technology and its development, Value Engineering, 31, 1, (2012)
  • [4] Shimizu Y., Egashira M., Basic aspects and challenges of semiconductor gas sensors, Mrs Bulletin, 24, 6, pp. 18-24, (2013)
  • [5] Lange D., Gleitner A., Ierlem A., Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds, Analytical Chemistry, 74, 13, pp. 3084-3095, (2002)
  • [6] Fadel L., Lochon F., Du F., Chemical sensing: millimeter size resonant microcantilever performance, Journal of Micromechanics and Microengineering, 14, 9, pp. 23-30, (2004)
  • [7] Thomas B., Murali K., Natalija B., Quantitative time-resolved measurement of membrane protein-ligand interactions using microcantilever array sensors, Nature Nanotechnology, 4, 3, pp. 179-185, (2009)
  • [8] Li P., Li X., Wang Y., Piezoresistive silicon dioxide micorcantilever sensor for chemical gas detection, Chinese Journal of Sensors & Actuators, 20, 10, pp. 2174-2177, (2007)
  • [9] Zhang J., Ding J., Wang Q., Et al., Adhesion stability of silicon microcantilevers under van der waals forces, Journal of Mechanical Strength, 29, 6, pp. 923-926, (2007)
  • [10] Zimmermann M., Volden T., Kirstein K.U., A CMOS-based integrated-system architecture for a static cantilever array, Sensors and Actuators B, 131, pp. 254-264, (2008)
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