Biodegradable and flexible capacitive pressure sensor for electronic skins

被引:0
|
作者
Song, Zichen [1 ]
Liu, Zengwen [1 ]
Zhao, Le [1 ]
Chang, Chunlei [1 ]
An, Wenxing [1 ]
Zheng, Haoren [3 ]
Yu, Shihui [1 ,2 ]
机构
[1] School of Microelectronics and Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, Tianjin University, Tianjin,300072, China
[2] Department of Electrical Engineering and Automation, Luoyang Institute of Science and Technology, Luoyang,471023, China
[3] School of International Microelectronics, Dongguan University of Technology, Guangdong, Dongguan,523808, China
关键词
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摘要
Capacitive sensors
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