Design of sphere seeds for glancing angle deposition

被引：0

作者：

Qu, Chuang ^{[1
]}

McNamara, Shamus ^{[1
]}

Walsh, Kevin ^{[1
]}

机构：

[1] Department Of Electrical And Computer Engineering, University Of Louisville, Department Of Electrical And Computer Engineering, 2210 S Brook St, Louisville,KY,40292, United States

来源：

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2022年 / 40卷 / 03期

关键词：

Compendex;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Spheres

引用