Preparation and characterization of solution deposition planarized Y2O3-Al2O3 compound seed layer for coated conductors

被引：1

作者：

Xue, Yan ^{[1
,2
]}

Hou, Xin ^{[1
]}

Zeng, Qiming ^{[2
]}

Yu, Fei ^{[2
]}

Liao, Chang ^{[3
]}

Li, Ji ^{[3
]}

Wang, Baolei ^{[4
]}

Qin, Zhenjun ^{[5
]}

Li, Yinxiang ^{[5
]}

机构：

[1] Tianjin Univ, Mat Sci & Engn, Tianjin 300072, Peoples R China

[2] Shenzhen Polytech, Sch Elect & Commun Engn, Shenzhen 518055, Peoples R China

[3] Shenzhen China Star Optoelect Semicond Display Tec, Shenzhen 518000, Peoples R China

[4] Wildsc Ningbo Intelligent Technol CO LTD, Ningbo 315000, Peoples R China

[5] Shaoyang Univ, Prov Key Lab Informat Serv Rural Area Southwestern, Shaoyang 422000, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2024年 / 35卷 / 18期

关键词：

YBCO; PROGRESS; FABRICATION; TEMPLATES; GROWTH;

D O I：

10.1007/s10854-024-12827-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we have successfully fabricated the second-generation YBa2Cu3O7 (YBCO)-coated conductors on the solution deposition planarization (SDP) yttrium oxide and aluminum oxide (Y2O3-Al2O3, YAlO) templates. Distinguishing from commercially available coated conductors, the SDP-YAlO process employs chemical solution deposition to fabricate multi-layer amorphous oxides on polycrystalline metal substrates, presenting a cost-effective alternative to replace sputtering-Al2O3, sputtering-Y2O3, and electrochemical polishing processes. The detailed SDP-YAlO fabrication process has been studied systematically. The YAlO seed layer exhibits smooth and flat surface morphology with an optimal root mean square roughness (RMS) of 1.6 nm over a 5 mu m x 5 mu m area, indicative of a smooth surface. Furthermore, the YBCO functional layer was deposited on ion beam-assisted deposition (IBAD) MgO buffer layers, utilizing both SDP-Y2O3 and SDP-YAlO as seed layers. The critical current (J(c)) uniformity of YBCO films on SDP-YAlO is much better that those on SDP-Y2O3, indicating the potential of SDP-YAlO as a promising seed layer for YBCO-coated conductors.

引用

页数：16