Preparation and characterization of solution deposition planarized Y2O3-Al2O3 compound seed layer for coated conductors

被引:2
作者
Xue, Yan [1 ,2 ]
Hou, Xin [1 ]
Zeng, Qiming [2 ]
Yu, Fei [2 ]
Liao, Chang [3 ]
Li, Ji [3 ]
Wang, Baolei [4 ]
Qin, Zhenjun [5 ]
Li, Yinxiang [5 ]
机构
[1] Tianjin Univ, Mat Sci & Engn, Tianjin 300072, Peoples R China
[2] Shenzhen Polytech, Sch Elect & Commun Engn, Shenzhen 518055, Peoples R China
[3] Shenzhen China Star Optoelect Semicond Display Tec, Shenzhen 518000, Peoples R China
[4] Wildsc Ningbo Intelligent Technol CO LTD, Ningbo 315000, Peoples R China
[5] Shaoyang Univ, Prov Key Lab Informat Serv Rural Area Southwestern, Shaoyang 422000, Peoples R China
关键词
YBCO; PROGRESS; FABRICATION; TEMPLATES; GROWTH;
D O I
10.1007/s10854-024-12827-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we have successfully fabricated the second-generation YBa2Cu3O7 (YBCO)-coated conductors on the solution deposition planarization (SDP) yttrium oxide and aluminum oxide (Y2O3-Al2O3, YAlO) templates. Distinguishing from commercially available coated conductors, the SDP-YAlO process employs chemical solution deposition to fabricate multi-layer amorphous oxides on polycrystalline metal substrates, presenting a cost-effective alternative to replace sputtering-Al2O3, sputtering-Y2O3, and electrochemical polishing processes. The detailed SDP-YAlO fabrication process has been studied systematically. The YAlO seed layer exhibits smooth and flat surface morphology with an optimal root mean square roughness (RMS) of 1.6 nm over a 5 mu m x 5 mu m area, indicative of a smooth surface. Furthermore, the YBCO functional layer was deposited on ion beam-assisted deposition (IBAD) MgO buffer layers, utilizing both SDP-Y2O3 and SDP-YAlO as seed layers. The critical current (J(c)) uniformity of YBCO films on SDP-YAlO is much better that those on SDP-Y2O3, indicating the potential of SDP-YAlO as a promising seed layer for YBCO-coated conductors.
引用
收藏
页数:16
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