[1] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
[3] Yongjiang Lab, Adv Ceram & Struct Ctr, Ningbo 315021, Peoples R China
[4] Renmin Univ China, Dept Phys, Beijing Key Lab Optoelect Funct Mat & Micronano De, Beijing 100872, Peoples R China