ZnO- Based Surface Acoustic Wave Droplet Sensor

被引：2

作者：

Soleimanpour, Farzaneh ^{[1
]}

Darbari, Sara ^{[1
]}

Barahimi, Behdad ^{[1
]}

Moravvej-Farshi, Mohammad Kazem ^{[1
]}

机构：

[1] Tarbiat Modares Univ, Elect & Comp Engn Dept, Tehran, Iran

来源：

2023 5TH IRANIAN INTERNATIONAL CONFERENCE ON MICROELECTRONICS, IICM | 2023年

关键词：

Surface Acoustic Wave (SAW); Sensor; Piezoelectric; SAW Device; Zinc Oxide (ZnO);

D O I：

10.1109/IICM60532.2023.10443163

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work we designed and fabricated a ZnObased SAW sensor with focused aluminum IDTs for DI water droplet sensing. We employed ZnO/SiO2/Si as the piezoelectric substrate in this study. A minimum measurable DI water droplet of 6 mgr was obtained in the presented SAW sensor.

引用

页码：186 / 189

页数：4

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