A Distributed Magnetostatic Resonator

被引:6
作者
Devitt, Connor [1 ]
Tiwari, Sudhanshu [1 ]
Bhave, Sunil A. [1 ]
Wang, Renyuan [2 ]
机构
[1] Purdue Univ, Elmore Family Sch Elect & Comp Engn, OxideMEMS Lab, W Lafayette, IN 47907 USA
[2] BAE Syst Inc, FAST Lab, Nashua, NH 03060 USA
关键词
Gold; Transducers; Magnetostatic waves; Magnetostatics; Couplings; Magnetoacoustic effects; Filters; Magnetostatic wave (MSW); micromachining; tunable resonator; yttrium iron garnet (YIG); TUNABLE MICROWAVE RESONATORS; WAVE; CIRCUIT; FILTER; TECHNOLOGY;
D O I
10.1109/TMTT.2024.3381549
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work reports the design, fabrication, and characterization of coupling-enhanced magnetostatic forward volume wave (MSFVW) resonators with significant spur suppression. The fabrication is based on surface micromachining of yttrium iron garnet (YIG) film on a gadolinium gallium garnet (GGG) substrate with thick gold transducers. A distributed resonator is used to excite forward volume waves in YIG to realize a frequency-dependent coupling boost. Fabricated devices at 18 and 7 GHz show coupling coefficients as high as 13% and quality factors above 1000. Higher order magnetostatic mode suppression is experimentally demonstrated through a combination of transducer and YIG geometry design.
引用
收藏
页码:5679 / 5686
页数:8
相关论文
共 54 条
[1]  
Adam J. D., 1985, IEEE 1985 Ultrasonics Symposium. Proceedings. (Cat. No.85CH2209-5), P157
[2]   SAW and BAW Technologies for RF Filter Applications: A Review of the Relative Strengths and Weaknesses [J].
Aigner, Robert .
2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, :582-589
[3]  
ARITURK G, 2022, PROC IEEE 22 ANN WIR, P1
[4]   A TUNABLE OSCILLATOR USING MAGNETOSTATIC FORWARD-VOLUME WAVE RESONATOR WITH WIDE STRIP TRANSDUCER [J].
ASAO, H ;
OHHASHI, H ;
OHWADA, T ;
ISHIDA, O .
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1995, 78 (05) :81-91
[5]   Strong magnon-photon coupling with chip-integrated YIG in the zero-temperature limit [J].
Baity, Paul G. ;
Bozhko, Dmytro A. ;
Macedo, Rair ;
Smith, William ;
Holland, Rory C. ;
Danilin, Sergey ;
Seferai, Valentino ;
Barbosa, Joao ;
Peroor, Renju R. ;
Goldman, Sara ;
Nasti, Umberto ;
Paul, Jharna ;
Hadfield, Robert H. ;
McVitie, Stephen ;
Weides, Martin .
APPLIED PHYSICS LETTERS, 2021, 119 (03)
[6]   Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW [J].
Barrera, Omar ;
Cho, Sinwoo ;
Matto, Lezli ;
Kramer, Jack ;
Huynh, Kenny ;
Chulukhadze, Vakhtang ;
Chang, Yen-Wei ;
Goorsky, Mark S. ;
Lu, Ruochen .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2023, 32 (06) :622-625
[7]   Mechanical on-chip microwave circulator [J].
Barzanjeh, S. ;
Wulf, M. ;
Peruzzo, M. ;
Kalaee, M. ;
Dieterle, P. B. ;
Painter, O. ;
Fink, J. M. .
NATURE COMMUNICATIONS, 2017, 8
[8]   Low-Voltage Electrostatic Actuation With Inherent Position Feedback [J].
Cagdaser, Baris ;
Boser, Bernhard E. .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (05) :1187-1196
[9]  
Carter P.S., 1961, IRE T MICROWAVE THEO, P252, DOI DOI 10.1109/TMTT.1961.1125316
[10]  
Connelly D. A., 2023, THESIS U NOTRE DAME