Research progress on the synthesis, microstructure, and properties of high-entropy alloy thin films

被引：0
|
作者：
Cao Q. [1 ]
Yang C. [1 ]
Wang X. [1 ]
Jiang J. [1 ]
机构：
[1] School of Materials Science & Engineering, Zhejiang University, Hangzhou
来源：
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica | 2022年 / 52卷 / 03期
关键词：
High entropy alloy thin films; Magnetron sputtering; Microstructure; Preparation; Properties;
D O I：
10.1360/SST-2020-0458
中图分类号：
学科分类号：
摘要：
High-entropy alloys represent a new type of metallic materials that have emerged in recent years. These alloys are composed of various elements with nearly equal atomic proportions and have structural features similar to those of ordered crystalline material in terms of packing but a disordered arrangement in terms of chemical composition. Such alloys show unique properties that differ from those of traditional alloys and excellent physical, chemical, and mechanical performance. High-entropy alloy film is a new type of film developed from high-entropy alloy; these films not only inherit the favorable properties of high-entropy alloys but also exhibit a number of improved properties. The constituent elements of high-entropy alloy films and film preparation parameters exert an important influence on the properties of the resulting films. Alteration of these factors yields high-entropy alloy films with different properties, such as diffusion resistance, corrosion resistance, high temperature stability, and biocompatibility. The technology of high-entropy alloy thin films for various applications has rapidly developed. Thus, these films have attracted wide attention and become a new research hotspot. This article describes the basic characteristics, preparation methods, microstructures, and properties of high-entropy alloy thin films, reviews the recent research progress on these films, and provides a brief summary of their future prospects. © 2022, Science Press. All right reserved.
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页码：359 / 374
页数：15
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