Local Anodic Oxidation of Silicon for Create Crossbar Architecture

被引：0

作者：

Polyakova, V. V. ^{[1
]}

Saenko, A. V. ^{[1
]}

机构：

[1] Southern Fed Univ, Rostov Na Donu 344006, Russia

来源：

TECHNICAL PHYSICS | 2024年 / 69卷 / 02期

关键词：

silicon; titanium; local anodic oxidation; neuromatrix; crossbar;

D O I：

10.1134/S1063784224010316

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Paper present possibility of creation a neuromatrix in the form crossbar architecture on a silicon substrate is shown. Crossbar architecture in the form of a set of nanosized conductors, between which there is a layer of titanium oxide, capable of changing its conductivity under the action of the applied voltage, it is proposed to form using the metho d of local anodic oxidation. The results is present of the study technological parameters of the metho d of local anodic oxidation silicon and titanium for the implementation of the elements of this neuromatrix in the form of a memristor structures.

引用

页码：357 / 363

页数：7

共 14 条

[1] Photoassisted scanning-probe nanolithography on Ti films [J].

Ageev A.O. ;

Konoplev B.G. ;

Polyakov V.V. ;

Svetlichnyi A.M. ;

Smirnov V.A. .

Russian Microelectronics, 2007, 36 (6) :353-357

[2] Studying the modes of nanodimensional surface profiling of Gallium Arsenide epitaxial structures by local anodic oxidation [J].

Avilov V.I. ;

Ageev O.A. ;

Smirnov V.A. ;

Solodovnik M.S. ;

Tsukanova O.G. .

Nanotechnologies in Russia, 2015, 10 (3-4) :214-219

[3]

Bayat F. M., 2017, Neuro-inspired Computing Using Resistive Synaptic Devices

[4] Electronic transport properties of single-crystal silicon nanowires fabricated using an atomic force microscope [J].

Clément, N ;

Tonneau, D ;

Dallaporta, H ;

Bouchiat, V ;

Fraboulet, D ;

Mariole, D ;

Gautier, J ;

Safarov, V .

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2002, 13 (2-4) :999-1002

[5] Role of space charge in scanned probe oxidation [J].

Dagata, JA ;

Inoue, T ;

Itoh, J ;

Matsumoto, K ;

Yokoyama, H .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (12) :6891-6900

[6]

George S., 2016, Syst, V24, P2253

[7] Microfabrication of biomedical lab-on-chip devices. A review; [Biomeditsiiniliste kiiplaborite valmistamine] [J].

Giannitsis A.T. .

Estonian Journal of Engineering, 2011, 17 (02) :109-139

[8] Finding a roadmap to achieve large neuromorphic hardware systems [J].

Hasler, Jennifer ;

Marr, Bo .

FRONTIERS IN NEUROSCIENCE, 2013, 7

[9]

Kruger-Sehm R., 2004, 11 INT C SURF ICS 2, VXI, P31

[10]

Panajotovic R., 2013, Cleaning Silicon and Gold-Coated Substrates for SPM Measurements

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