In situ characterization of stresses, deformation and fracture of thin films using transmission X-ray nanodiffraction microscopy

被引:5
|
作者
Lotze, Gudrun [1 ,2 ]
Iyer, Anand H. S. [3 ]
Backe, Olof [3 ]
Kalbfleisch, Sebastian [1 ]
Colliander, Magnus Hornqvist [3 ]
机构
[1] MAX IV Lab, Lund, Sweden
[2] LINXS Inst Adv Neutron & Xray Sci, Lund, Sweden
[3] Chalmers Univ Technol, Dept Phys, Gothenburg, Sweden
关键词
RESIDUAL-STRESS; MECHANICAL-PROPERTIES; MICROSTRUCTURE; GRADIENTS; EVOLUTION; DIFFRACTION;
D O I
10.1107/S1600577523010093
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The use of hard X-ray transmission nano- and microdiffraction to perform in situ stress and strain measurements during deformation has recently been demonstrated and used to investigate many thin film systems. Here a newly commissioned sample environment based on a commercially available nanoindenter is presented, which is available at the NanoMAX beamline at the MAX IV synchrotron. Using X-ray nanoprobes of around 60-70 nm at 14-16 keV and a scanning step size of 100 nm, we map the strains, stresses, plastic deformation and fracture during nanoindentation of industrial coatings with thicknesses in the range of several micrometres, relatively strong texture and large grains. The successful measurements of such challenging samples illustrate broad applicability. The sample environment is openly accessible for NanoMAX beamline users through the MAX IV sample environment pool, and its capability can be further extended for specific purposes through additional available modules.
引用
收藏
页码:42 / 54
页数:13
相关论文
共 50 条
  • [11] X-ray diffraction analysis of residual stresses in textured ZnO thin films
    Dobrocka, E.
    Novak, P.
    Buc, D.
    Harmatha, L.
    Murin, J.
    APPLIED SURFACE SCIENCE, 2017, 395 : 16 - 23
  • [12] X-ray diffraction analysis residual stresses and elasticity constants in thin films
    Goudeau, P
    Renault, PO
    Badawi, KF
    Villain, P
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2001, 56 (301): : 541 - +
  • [13] In situ synchrotron X-ray diffraction analysis of deformation behaviour in Ti-Ni-based thin films
    Wang, Hong
    Sun, Guangai
    Wang, Xiaolin
    Chen, Bo
    Zu, Xiaotao
    Liu, Yanping
    Li, Liangbin
    Pan, Guoqiang
    Sheng, Liusi
    Liu, Yaoguang
    Fu, Yong Qing
    JOURNAL OF SYNCHROTRON RADIATION, 2015, 22 : 34 - 41
  • [14] Soft X-ray photoelectron microscopy used for the characterization of diamond, a-C and CNx, thin films
    Ziethen, C
    Wegelin, F
    Schönhense, G
    Ohr, R
    Neuhäuser, M
    Hilgers, H
    DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) : 1068 - 1073
  • [15] X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via
    Todt, J.
    Hammer, H.
    Sartory, B.
    Burghammer, M.
    Kraft, J.
    Daniel, R.
    Keckes, J.
    Defregger, S.
    JOURNAL OF APPLIED CRYSTALLOGRAPHY, 2016, 49 : 182 - 187
  • [16] Direct in situ observation of ZnO nucleation and growth via transmission X-ray microscopy
    Tay, S. E. R.
    Goode, A. E.
    Weker, J. Nelson
    Cruickshank, A. A.
    Heutz, S.
    Porter, A. E.
    Ryan, M. P.
    Toney, M. F.
    NANOSCALE, 2016, 8 (04) : 1849 - 1853
  • [17] In situ imaging of dealloying during nanoporous gold formation by transmission X-ray microscopy
    Chen-Wiegart, Yu-chen Karen
    Wang, Steve
    Lee, Wah-Keat
    McNulty, Ian
    Voorhees, Peter W.
    Dunand, David C.
    ACTA MATERIALIA, 2013, 61 (04) : 1118 - 1125
  • [18] Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy
    Saghaeian, F.
    Keckes, J.
    Woehlert, S.
    Rosenthal, M.
    Reisinger, M.
    Todt, J.
    THIN SOLID FILMS, 2019, 691
  • [19] Structural characterization of polycrystalline thin films by X-ray diffraction techniques
    Pandey, Akhilesh
    Dalal, Sandeep
    Dutta, Shankar
    Dixit, Ambesh
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2021, 32 (02) : 1341 - 1368
  • [20] Multiscale in-situ characterization of static recrystallization using dark-field X-ray microscopy and high-resolution X-ray diffraction
    Lee, Sangwon
    Berman, Tracy D.
    Yildirim, Can
    Detlefs, Carsten
    Allison, John E.
    Bucsek, Ashley
    SCIENTIFIC REPORTS, 2024, 14 (01)