In situ characterization of stresses, deformation and fracture of thin films using transmission X-ray nanodiffraction microscopy

被引:5
|
作者
Lotze, Gudrun [1 ,2 ]
Iyer, Anand H. S. [3 ]
Backe, Olof [3 ]
Kalbfleisch, Sebastian [1 ]
Colliander, Magnus Hornqvist [3 ]
机构
[1] MAX IV Lab, Lund, Sweden
[2] LINXS Inst Adv Neutron & Xray Sci, Lund, Sweden
[3] Chalmers Univ Technol, Dept Phys, Gothenburg, Sweden
关键词
RESIDUAL-STRESS; MECHANICAL-PROPERTIES; MICROSTRUCTURE; GRADIENTS; EVOLUTION; DIFFRACTION;
D O I
10.1107/S1600577523010093
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The use of hard X-ray transmission nano- and microdiffraction to perform in situ stress and strain measurements during deformation has recently been demonstrated and used to investigate many thin film systems. Here a newly commissioned sample environment based on a commercially available nanoindenter is presented, which is available at the NanoMAX beamline at the MAX IV synchrotron. Using X-ray nanoprobes of around 60-70 nm at 14-16 keV and a scanning step size of 100 nm, we map the strains, stresses, plastic deformation and fracture during nanoindentation of industrial coatings with thicknesses in the range of several micrometres, relatively strong texture and large grains. The successful measurements of such challenging samples illustrate broad applicability. The sample environment is openly accessible for NanoMAX beamline users through the MAX IV sample environment pool, and its capability can be further extended for specific purposes through additional available modules.
引用
收藏
页码:42 / 54
页数:13
相关论文
共 50 条
  • [1] X-ray nanodiffraction reveals strain and microstructure evolution in nanocrystalline thin films
    Keckes, J.
    Bartosik, M.
    Daniel, R.
    Mitterer, C.
    Maier, G.
    Ecker, W.
    Vila-Comamala, J.
    David, C.
    Schoeder, S.
    Burghammer, M.
    SCRIPTA MATERIALIA, 2012, 67 (09) : 748 - 751
  • [2] In situ X-ray characterization of piezoelectric ceramic thin films
    Evans, Paul G.
    Sichel-Tissot, Rebecca J.
    AMERICAN CERAMIC SOCIETY BULLETIN, 2013, 92 (01): : 18 - 23
  • [3] Indentation response of a superlattice thin film revealed by in-situ scanning X-ray nanodiffraction
    Todt, J.
    Krywka, C.
    Zhang, Z. L.
    Mayrhofer, P. H.
    Keckes, J.
    Bartosik, M.
    ACTA MATERIALIA, 2020, 195 : 425 - 432
  • [4] High resolution X-ray and electron microscopy characterization of PZT thin films prepared by RF magnetron sputtering
    Maurya, K. K.
    Halder, S. K.
    Sen, Suchitra
    Bose, Ankita
    Bysakh, Sandip
    APPLIED SURFACE SCIENCE, 2014, 313 : 196 - 206
  • [5] Strains, stresses and elastic properties in polycrystalline metallic thin films: in situ deformation combined with x-ray diffraction and simulation experiments
    Goudeau, P.
    Faurie, D.
    Girault, B.
    Renault, P. -O.
    Le Bourhis, E.
    Villain, P.
    Badawi, F.
    Castelnau, O.
    Brenner, R.
    Bechade, J. -L.
    Geandier, G.
    Tamura, N.
    RESIDUAL STRESSES VII, 2006, 524-525 : 735 - 740
  • [6] Ion irradiation-induced localized stress relaxation in W thin film revealed by cross-sectional X-ray nanodiffraction
    Hlushko, K.
    Mackova, A.
    Zalesak, J.
    Burghammer, M.
    Davydok, A.
    Krywka, C.
    Daniel, R.
    Keckes, J.
    Todt, J.
    THIN SOLID FILMS, 2021, 722
  • [7] In Situ Laboratory-Based Transmission X-Ray Microscopy and Tomography of Material Deformation at the Nanoscale
    Patterson, B. M.
    Cordes, N. L.
    Henderson, K.
    Mertens, J. C. E.
    Clarke, A. J.
    Hornberger, B.
    Merkle, A.
    Etchin, S.
    Tkachuk, A.
    Leibowitz, M.
    Trapp, D.
    Qiu, W.
    Zhang, B.
    Bale, H.
    Lu, X.
    Hartwell, R.
    Withers, P. J.
    Bradley, R. S.
    EXPERIMENTAL MECHANICS, 2016, 56 (09) : 1585 - 1597
  • [8] X-ray nanodiffraction analysis of residual stresses in polysilicon electrodes of vertical power transistors
    Karner, Stefan
    Blank, Oliver
    Roesch, Maximilian
    Burghammer, Manfred
    Zalesak, Jakub
    Keckes, Jozef
    Todt, Juraj
    MATERIALIA, 2022, 24
  • [9] Nondestructive characterization of thin films and coatings using X-ray diffraction techniques
    Pineault, JA
    Drake, RJ
    Belassel, M
    Brauss, ME
    SURFACE ENGINEERING: COATING AND HEAT TREATMENTS, PROCEEDINGS, 2003, : 268 - 272
  • [10] In-situ characterization of the solution heat treatment of B319 aluminum alloy using x-ray diffraction and electron microscopy
    Vandersluis, Eli
    Andilab, Bernoulli
    Ravindran, Comondore
    Bamberger, Menachem
    MATERIALS CHARACTERIZATION, 2020, 167