Micro-Displacement Measurement Technology Based on Littrow-Configured Laser Feedback Grating Interference

被引：0

作者：

Kong L. ^{[1
]}

Cai W. ^{[1
]}

Shi L. ^{[1
]}

Guo D. ^{[1
]}

Xia W. ^{[1
]}

Ni X. ^{[1
]}

Hao H. ^{[1
]}

Wang M. ^{[1
]}

机构：

[1] School of Physical Science and Technology, Nanjing Normal University, Nanjing, 210023, Jiangsu

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2019年 / 46卷 / 04期

关键词：

Diffraction grating; Displacement measurement; Littrow configuration; Measurement; Self-mixing interference; Sinusoidal modulation;

D O I：

10.3788/CJL201946.0404012

中图分类号：

学科分类号：

摘要：

By introducing a diffraction grating into the laser feedback interference(LFI) system, we propose a laser feedback grating interferometry (LFGI) based on Littrow configuration for the measurement of one-dimensional and two-dimensional displacement. The beam emitted from the semiconductor laser is incident onto the reflective holographic grating under the condition of Littrow configuration. After the diffracted light returns to the laser cavity in the direction of the incident light, a laser feedback interference effect occurs in the cavity. The sinusoidal phase modulation and demodulation technique is introduced to obtain the one-dimensional and two-dimensional displacement with high precision. The Littrow configuration and LFGI system have the advantages of great self-collimation, compact structure, easy operation and high stability. The experimental results show that the displacement measurement accuracy of the Littrow LFGI system can reach the order of 10 nm. © 2019, Chinese Lasers Press. All right reserved.

引用

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