Development and practical application of non-contact and high accuracy rotary encoder system with self-calibration

被引:0
作者
Ishii N.
Taniguchi K.
Eguchi S.
Kimisawa Y.
Okoshi S.
机构
来源
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2019年 / 85卷 / 02期
关键词
Angular measurement; Compensation; High resolution; Non-contact measurement; Rotary encoder; Self-calibration; Ultra-precision;
D O I
10.2493/jjspe.85.137
中图分类号
学科分类号
摘要
[No abstract available]
引用
收藏
页码:137 / 140
页数:3
相关论文
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Laserscale Encoders