Preparation and Properties of Low-Dielectric Polyimide Films Containing Tert-Butyl

被引:9
作者
Li, Xin [1 ]
Zheng, Rongrong [1 ]
Wang, Cheng [2 ,3 ]
Chang, Haiyang [2 ,3 ]
Chen, Shuwu [4 ]
Wang, Liyan [1 ]
Cui, Xue [1 ]
Liu, Yutao [1 ]
Li, Junhao [1 ]
Yu, Guangning [1 ]
Shi, Ji [1 ]
机构
[1] Shenyang Univ Technol, Sch Petrochem Engn, Liaoyang 111003, Peoples R China
[2] Guangdong Univ Technol, Sch Chem Engn & Light Ind, Guangzhou 510006, Peoples R China
[3] Guangdong Prov Lab Chem & Fine Chem Engn Jieyang C, Jieyang 522000, Peoples R China
[4] Liaoyang Petrochem Co, Aromat Lab, Liaoyang 111003, Peoples R China
关键词
low-dielectric; polyimides; tert-butyl; microelectronics industry; films; MECHANICAL-PROPERTIES; RESEARCH PROGRESS; PERMITTIVITY; BEHAVIOR;
D O I
10.3390/polym16070984
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
The design of high-performance polyimide (PI) films and understanding the relationship of the structure-dielectric property are of great significance in the field of the microelectronics industry, but are challenging. Herein, we describe the first work to construct a series of novel tert-butyl PI films (denoted as PI-1, PI-2, PI-3, and PI-4) based on a low-temperature polymerization strategy, which employed tetracarboxylic dianhydride (pyromellitic anhydride, 3,3 ',4,4 '-biphenyl tetracarboxylic anhydride, 4,4 '-diphenyl ether dianhydride, and 3,3 ',4,4 '-benzophenone tetracarboxylic anhydride) and 4,4 '-diamino-3,5-ditert butyl biphenyl ether as monomers. The results indicate that introducing tert-butyl branches in the main chain of PIs can enhance the free volume of the molecular chain and reduce the interaction between molecular chains of PI, resulting in a low dielectric constant. Particularly, the optimized PI-4 exhibits an excellent comprehensive performance with a high (5) wt% loss temperature (454 degrees C), tensile strength (117.40 MPa), and maximum hydrophobic angle (80.16 degrees), and a low dielectric constant (2.90), which outperforms most of the results reported to date.
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页数:13
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