[1] Peking Univ, Sch Integrated Circuits, Natl Key Lab Adv Micro & Nano Manufacture Technol, Beijing 100871, Peoples R China
[2] Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
[3] Peking Univ, Coll Chem & Mol Engn, Beijing 100871, Peoples R China
[4] Beijing Graphene Inst, Technol Innovat Ctr Graphene Metrol & Standardizat, Beijing 100095, Peoples R China
[5] Natl Univ Singapore, Dept Chem & Biomol Engn, Singapore 117576, Singapore
[6] Beijing Adv Innovat Ctr Integrated Circuits, Beijing 100871, Peoples R China