Specific binding of DNA origami on a nanoscale pattern formed by AFM lithography

For functionalization of Nano/Micro Electro Mechanical Systems (N/MEMS) by integrating nanomaterials, DNA origami which can arrange nanomaterials precisely on its structure is capable of being used as a scaffold. To realize this integration, single-stranded (ssDNA) was formed on the nanoscale pattern created by AFM lithography on a chip, so as to assemble DNA origami labeled with complementary ssDNA. In this paper, chemically stable hydrophobic mask layer and reaction path for forming ssDNA specifically on the nanopattern were newly used. As a result, immobilization yield of DNA origami was successfully improved by well-formed ssDNA on nanopattern, and the feasibility of the proposed immobilization method was experimentally proved. © 2019 The Institute of Electrical Engineers of Japan.