Design and analysis of flexure hinge displacement mechanism with nano precision

被引：0
作者：
Zeng C. [1 ,2 ,3 ]
Mao C. [3 ]
He Y. [3 ]
Li A. [1 ,3 ]
机构：
[1] Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai
[2] University of Chinese Academy of Sciences, Beijing
[3] Research Center for Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai
来源：
He Jishu/Nuclear Techniques | 2022年 / 45卷 / 07期
关键词：
3D printing; Finite element analysis; Flexure hinge; Precision positioning; X-ray nanoprobe;
D O I：
10.11889/j.0253-3219.2022.hjs.45.070101
中图分类号：
学科分类号：
摘要：
[Background] The focusing spot size of advanced synchrotron radiation hard X-ray nanoprobe can reach 10 nm level. For example, the Shanghai Synchrotron Radiation Facility Hard X-ray Nanoprobe Beamline has strict requirements for the accuracy, stability, travel range and load of the mechanism of focusing optical components with nano precision. [Purpose] This study aims to design a circular parallel linkage flexure hinge displacement mechanism with one-dimensional linear motion and ultra-high stability according to the requirements of hard X-ray Kirkpatrick-Baez nano-focusing. [Methods] Firstly, the analysis of the correspondence between the force input and the displacement output of the flexible hinge structure was carried out by the classical elastic theory. Then, the accuracy of the calculation was validated using finite element simulation, and the stability analysis of the flexible hinge mechanism under load conditions is carried out by finite element simulation. Finally, 3D-printed flexure hinge positioning mechanism prototype was tested for the verification of its motion range and accuracy. [Results] The theoretical calculation is consistent with the finite element simulation with about 2% error. The motion range of tested prototype is 0.2 mm with positioning stability of ±1.1 nm (root mean square, RMS). [Conclusions] The designed flexible hinge mechanism of this study has an appropriate excellent dynamic performance, and high stability. It will help to develop high precision displacement mechanisms for synchrotron nano-focusing optical components in domestic. © 2022 Science Press. All rights reserved.
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