Research on Optical Vacuum Measurement Technology Based on Fabry-Perot Cavity

被引：0
作者：
Fan D. [1 ,2 ]
Li D.-T. [1 ,2 ]
Xi Z.-H. [2 ]
Liu K. [1 ]
机构：
[1] School of Mechanical Engineering & Automation, Northeastern University, Shenyang
[2] Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou
来源：
Dongbei Daxue Xuebao/Journal of Northeastern University | 2023年 / 44卷 / 07期
关键词：
Fabry-Perot cavity; gas refractive index; quantization; uncertainty; vacuum measurement;
D O I：
10.12068/j.issn.1005-3026.2023.07.010
中图分类号：
学科分类号：
摘要：
Based on the ab initio theory, the physical parameters such as molar polarization, molar susceptibility and Virial coefficient of argon gas were calculated, and the theoretical parameter model of gas pressure about refractive index was established by combining the Virial equation of state and Lorentz-Lorenz equation. The optical vacuum measuring device based on the Fabry-Perot cavity was used to accurately measure the resonant frequency change of the laser in the Fabry-Perot cavity to obtain the gas refractive index and gas pressure. At 105 Pa, the relative uncertainty of the refractive index is 1. 8 × 10 - 11 , and the relative uncertainty of the gas pressure is 4. 4 × 10 - 6 . The measured pressures obtained by the optical vacuum measuring device based on the Fabry-Perot cavity and the capacitance film vacuum gauge were compared and analyzed. The results showed that the Fabry-Perot cavity based optical vacuum measuring method has higher stability and accuracy. © 2023 Northeastern University. All rights reserved.
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页码：989 / 995
页数：6
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