Highly ionized precipitation processes for carbon-based hard material coatings

被引：0
|
作者：
Bandorf R. [1 ]
机构：
[1] Gruppenleiter Hochionisierte Plasmen und PECVD, Fraunhofer IST, Braunschweig
来源：
JOT, Journal fuer Oberflaechentechnik | 2019年 / 59卷
关键词：
D O I：
10.1007/s35144-019-0068-7
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：29 / 31
页数：2
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