Microstructure and Magnetron Sputtering Properties of W/Re Alloy Targets Fabricated by Powder Metallurgy

被引:0
作者
Wang, Yueming [1 ,2 ]
Tang, Qiuhao [2 ]
Xiong, Xiang [3 ]
机构
[1] Hunan Provincial Key Laboratory of High Efficiency and Precision Machining of Difficult-to-Cut Material, Hunan University of Science and Technology, Xiangtan,411201, China
[2] Hunan Provincial Key Defense Laboratory of High Temperature Wear-Resisting Materials and Preparation Technology, Hunan University of Science and Technology, Xiangtan,411201, China
[3] State Key Laboratory of Powder Metallurgy, Central South University, Changsha,410083, China
来源
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2021年 / 50卷 / 03期
关键词
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学科分类号
摘要
Thin films
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页码:1044 / 1054
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