Optimization and analysis of a closed-loop MEMS accelerometer with enhanced bandwidth

被引：0
|
作者：
Jani, Nikul [1 ]
Menon, P. Krishna [2 ]
Pandey, Ashok Kumar [1 ]
机构：
[1] Indian Inst Technol, Mech & Aerosp Engn, Hyderabad 502284, Telangana, India
[2] Res Ctr Imarat, Hyderabad 500069, India
来源：
2024 IEEE APPLIED SENSING CONFERENCE, APSCON | 2024年
关键词：
INERTIAL SENSORS;
D O I：
10.1109/APSCON60364.2024.10465849
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A displacement amplifier with curved and inclined beam configuration has been optimized to enhance the natural frequency of MEMS accelerometer. A regression algorithm has been used to predict the natural frequency and sensitivity of displacement amplifier-based MEMS accelerometers. Based on the established relationship, the optimization of geometrical parameters could provide a MEMS accelerometer with a more than 15 % increase in the input signal bandwidth. A switched capacitor-based signal conditioning circuit has been utilized to generate voltage output, and the influence of nonlinearity within the circuit on the closed-loop and open-loop MEMS accelerometer has been analyzed. Using the closed-loop control approach, the measurement range has been increased from +/- 6g to +/- 30g.
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页数：4
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