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Si M., Lin Z., Chen Z., Sun X., Wang H., Ye P.D., Scaled indium oxide transistors fabricated using atomic layer deposition, Nat. Electron., 5, pp. 164-170, (2022)
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Jacobs K.J.P., Murakami H., Murakami F., Serita K., Beyne E., Tonouchi M., Characterization of through-silicon vias using laser terahertz emission microscopy, Nat. Electron., 4, pp. 202-207, (2021)
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Zhu L., Yang G.-L., Ding W.-J., Cao Y.-Q., Li W.-M., Li A.-D., Growth behavior of Ir metal formed by atomic layer deposition in the nanopores of anodic aluminum oxide, Dalt. Trans., 51, pp. 9664-9672, (2022)
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Huang B., Yang W., Wen Y., Shan B., Chen R., Co<sub>3</sub>O<sub>4</sub>-modified TiO<sub>2</sub> nanotube arrays via atomic layer deposition for improved visible-light photoelectrochemical performance, ACS Appl. Mater. Interfaces, 7, pp. 422-431, (2015)
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Lee S., Kim J., Oh J., Ryu J., Hwang K., Hwang J., Kang S., Choi J.H., Sim Y.C., Cho Y.-H., Chung T.H., Jeong T., Park Y., Yoon E., A discrete core-shell-like micro-light-emitting diode array grown on sapphire nano-membranes, Sci. Rep., 10, (2020)
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Zhang J., Li Y., Cao K., Chen R., Advances in atomic layer deposition, Nanomanufacturing Metrol., 5, pp. 191-208, (2022)