Design and Experimental Study of a Novel Inchworm Piezoelectric Linear Actuator

被引：0

作者：

Bai D. ^{[1
]}

Deng S. ^{[1
]}

Li Y. ^{[2
]}

Shen G. ^{[1
]}

Zhu Z. ^{[1
]}

机构：

[1] School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou

[2] Shanghai Aerospace Control Technology Institute, Shanghai

来源：

Zhendong Ceshi Yu Zhenduan/Journal of Vibration, Measurement and Diagnosis | 2023年 / 43卷 / 03期

关键词：

displacement amplification; inchworm type; piezoelectric actuator; PZT stack; self-locking when power off;

D O I：

10.16450/j.cnki.issn.1004-6801.2023.03.003

中图分类号：

学科分类号：

摘要：

Considering the piezoelectric actuators have characteristics of wide temperature resistance range，no electromagnetic interference，and self-locking when powered off，a novel inchworm piezoelectric linear actuator，which meets the demand of new actuators for small grasping operating mechanisms in the aerospace environment，is proposed imitating the walking mode of the insect inchworm. A flexible hinge-type displacement amplifying mechanism is utilized to amplify the output displacement of the Pb-Zr-Ti（PZT）stack，so as to increase the movement step length of the linear actuator and the clamping deformation of the guide rail. The multiple PZT stacks are divided into three groups，which are respectively used as two clamping units and one propulsion unit of the actuator to obtain a larger driving force and further increase the movement step. Through the finite element analysis method，the prediction method of the electromechanical coupling behavior of the PZT stack is studied，and the feasibility of the method is verified by experiments. The flexible hinge displacement amplification mechanism is simplified，and the numerical analysis method of magnification is proposed. On this basis，an experimental study is carried out based on the designed linear actuator. The test results show the magnification of the output displacement of the PZT stack by the displacement amplifying mechanism is 7.3，which is between the theoretical value and the simulation one. When the excitation voltage frequency is 5 Hz，the maximum no-load moving speed of the actuator is 413 μm/s；the maximum driving force is 16 N，corresponding to a driving speed of 19 μm/s. The above research results can provide technical support for the intelligent drive of small grasping operating mechanisms. © 2023 Nanjing University of Aeronautics an Astronautics. All rights reserved.

引用

页码：435 / 441and616

共 28 条

[1]

VOSSOUGHI G., Study of a piezo-electric actuated vibratory micro-robot in stick-slip mode and investigating the design parameters ［J］, Nonlinear Dynamics, 89, 3, pp. 1927-1948, (2017)

[2]

CHEN C., Micro converter with a high step-up ratio to drive a piezoelectric bimorph actuator applied in mobile robots［J］, International Journal of Advanced Robotic Systems, 15, 2, pp. 1-9, (2018)

[3]

QIAO P Y，, YANG J，, DAI C，, Et al., Design of composite disturbance observer and continuous terminal sliding mode control for piezoelectric nanopositioning stage［J］, Electronics, 10, 18, (2021)

[4]

FENG C, Et al., AIN based piezoelectric micromirror ［J］, Optics Letters, 43, 5, pp. 987-990, (2018)

[5]

SONG Shuaiguan, YANG Yiling, WU Gaohua, Et al., Design and analysis of a piezoelectric compliant x-y mi-crogripper［J］, Journal of Vibration and Shock, 41, 10, pp. 154-161, (2022)

[6]

FLEMING A J, YONG Y K., An ultrathin monolithic XY nanopositioning stage constructed from a single sheet of piezoelectric material ［J］, IEEE/ASME Transactions on Mechatronics, 22, 6, pp. 2611-2618, (2017)

[7]

Compensation of hysteresis in the piezoelectric nanopositioning stage under reciprocating linear voltage based on a mark-segmented PI model ［J］, Micromachines, 11, 1, (2020)

[8]

LIU Fan, ZHOU Jinxiong, MA Xiaofei, Electromechanical coupling analysis of piezoelectrically driven six-degree-of-freedom pointing platform［J］, Journal of Mechanical Engineering, 56, 7, pp. 10-15, (2020)

[9]

LU Qian, CHEN Xifu, HUANG Weiqing, Et al., Application of rhombic piezoelectric actuator in parallel positioning platform［J］, Journal of Vibration，Measurement & Diagnosis, 40, 4, pp. 680-688, (2020)

[10]

WANG G W, XU Q S., Design and precision position/ force control of a piezo-driven microinjection system［J］, IEEE/ASME Transactions on Mechatronics, 22, 4, pp. 1744-1754, (2017)

← 1 2 3 →