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- [5] Dry etch release processes for micromachining applications JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 2553 - 2557
- [6] Review: Electrochemical DNA sensing - Principles, commercial systems, and applications BIOSENSORS & BIOELECTRONICS, 2020, 154
- [9] Silicon Microneedles for Transdermal Applications by Electrochemical Micromachining Technology 2014 IEEE SENSORS, 2014,