Deposition of titanium films on complex bowl-shaped workpieces using DCMS and HiPIMS

被引：0

作者：

Xie, Dong ^{[1
]}

Wei, L.J. ^{[1
]}

Liu, H.Y. ^{[2
]}

Zhang, K. ^{[2
]}

Leng, Y.X. ^{[2
]}

Matthews, D.T.A. ^{[3
]}

Ganesan, R. ^{[4
]}

Su, Y.Y. ^{[5
]}

机构：

[1] Key Laboratory of Advanced Technologies of Materials, Ministry of Education of China, School of Physical Science and Technology, Southwest Jiaotong University, Chengdu,610031, China

[2] Sichuan Province International Science and Technology Cooperation Base of Functional Materials, School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu,610031, China

[3] Department of Mechanics of Solids Surfaces and Systems, Faculty of Engineering Technolog, The University of Twente, Netherlands

[4] School of Physics, University of Sydney, Sydney,NSW,2006, Australia

[5] Research Institute for New Materials Technology, Chongqing University of Arts and Sciences, Chongqing,402160, China

来源：

Surface and Coatings Technology | 2022年 / 442卷

关键词：

Compendex;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Magnetron sputtering

引用