Dielectric Properties of Structurally Optimized Heterogenous Ca(Mg1/3Ta2/3)O3/CaTiO3 Thin Films

被引：0
作者：
Li R. [1 ]
Li Y. [1 ]
Yan C. [1 ]
Bao Y. [2 ]
Sun H. [3 ]
Hu H. [4 ]
Li N. [4 ]
机构：
[1] School of Material Science and Engineering, Jingdezhen Ceramic Institute, Jingdezhen
[2] National Key Laboratory of Green Building Materials, China Building Materials Academy, Beijing
[3] State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, School of Materials Science and Engineering, Wuhan University of Technology, Wuhan
[4] Tuozhou Construction Company Limited, Ganzhou
来源：
| 1600年 / Chinese Ceramic Society卷 / 49期
关键词：
Dielectric properties; Heterogeneous interface; Microstructure; Thin films;
D O I：
10.14062/j.issn.0454-5648.20190823
中图分类号：
学科分类号：
摘要：
The homogeneous Ca(Mg1/3Ta2/3)O3 (CMT), CaTiO3 (CT) dielectric thin films and heterogeneous CMT/CT films with different stacking sequences and different mole ratios of CMT and CT were deposited on Pt/Ti/SiO2/Si(100) substrates by a Pechini method, respectively. The results show that the hetero-layered CMT/CT films with CT film as the first layer have single perovskite phase. However, a secondary phase diffraction peaks appear in the hetero-layered CMT/CT films with CMT film as the first layer. Meanwhile, the CT peak gradually weakens and finally disappears with increasing CMT mole ratio in the hetero-layered CMT/CT films with CT film as the first layer, indicating CT favored the CMT forming perovskite phase. The dielectric property characterizations show that the dielectric constant is highly dependent upon the mole ratio of CMT in hetero-layered CMT/CT films. However, the dielectric loss is not only dependent on the mole ratio of CMT, but also the interface number of CMT/CT thin films. The optimized dielectric constant and loss were found to be 56 and 0.038 under the mole ratio of 1:1 for CMT to CT, respectively. © 2021, Editorial Department of Journal of the Chinese Ceramic Society. All right reserved.
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页码：174 / 179
页数：5
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