Highly sensitive flexible strain sensor based on the two-dimensional semiconductor tellurium with a negative gauge factor

被引:2
作者
He, Jiarui [1 ,2 ,3 ]
Qu, Yusong [4 ]
Chen, Shengyao [4 ]
Wang, Cong [1 ]
Du, Lena [5 ]
Du, Xiaoshan [4 ]
Zheng, Yuanyuan [1 ]
Zhao, Guozhong [5 ]
Tian, He [2 ,3 ]
机构
[1] Beijing Univ Chem Technol, Coll Math & Phys, Beijing 100029, Peoples R China
[2] Tsinghua Univ, Sch Integrated Circuits, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Beijing Natl Res Ctr Informat Sci & Technol BNRist, Beijing 100084, Peoples R China
[4] Univ Chinese Acad Sci, CAS Ctr Excellence Nanosci, Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China
[5] Capital Normal Univ, Dept Phys, Key Lab Terahertz Optoelect Minist Educ, Beijing Key Lab Terahertz Spect & Imaging, Beijing 100048, Peoples R China
基金
中国国家自然科学基金; 北京市自然科学基金;
关键词
2D semiconductor materials; 2D tellurium; flexible electronics; strain sensors; negative gauge factor; high sensitivity; FIELD-EFFECT TRANSISTORS;
D O I
10.1007/s11432-023-3938-y
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Research on flexible strain sensors has advanced rapidly in recent years, with particular attention being devoted to two-dimensional (2D) semiconductor materials owing to their exceptional mechanical and electrical properties that are conducive to sophisticated sensing performance. However, resistive strain sensors based on 2D semiconductor materials typically exhibit positive gauge factors (GF), while materials for strain sensors with a negative GF remain elusive. We have identified a trend of reduction in the band gap of the emerging 2D semiconductor material tellurium (Te) under strain in simulations reported in past research, and have observed a negative GF in the Te-based strain sensor. In this study, we combined Te with a flexible polyethylene terephthalate (PET) substrate to manufacture a flexible strain sensor with a significantly negative GF. The results of tests revealed that the Te-based strain sensor achieved an impressive maximum sensitivity of -139.7 within a small range of bending-induced strain (< 1%). Furthermore, it exhibited excellent linearity and good cyclic stability, and was successfully applied to monitor limb movements. The work here verifies the significant potential for the use of Te-based strain sensors in next-generation flexible electronics.
引用
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页数:10
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