High-speed performance self-powered short wave ultraviolet radiation detectors based on κ(ε)-Ga2O3

被引:12
作者
Almaev, Aleksei [1 ,2 ]
Tsymbalov, Alexander [1 ]
Kushnarev, Bogdan [1 ]
Nikolaev, Vladimir [3 ,4 ]
Pechnikov, Alexei [4 ]
Scheglov, Mikhail [4 ]
Chikiryaka, Andrei [4 ]
Korusenko, Petr [5 ,6 ]
机构
[1] Natl Res Tomsk State Univ, Res & Dev Ctr Adv Technol Microelect, Tomsk 634050, Russia
[2] Fokon LLC, Kaluga 248035, Russia
[3] Natl Univ Sci & Technol MISIS, Dept Semicond Elect & Phys Semicond, Moscow 119049, Russia
[4] Perfect Crystals LLC, St Petersburg 194223, Russia
[5] St Petersburg State Univ, Dept Solid State Elect, St Petersburg 199034, Russia
[6] Omsk State Tech Univ, Dept Phys, Omsk 644050, Russia
基金
俄罗斯科学基金会;
关键词
kappa(epsilon)-gallium oxide; solar-blind shortwave ultraviolet radiation detectors; self-powered operation mode; CHEMICAL-VAPOR-DEPOSITION; EPSILON-GA2O3; THIN-FILMS; BLIND; PHOTODETECTOR; FABRICATION; MECHANISM; SAPPHIRE; GROWTH; LAYERS; MOCVD;
D O I
10.1088/1674-4926/45/4/042502
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
High-speed solar-blind short wavelength ultraviolet radiation detectors based on kappa(epsilon)-Ga2O3 layers with Pt contacts were demonstrated and their properties were studied in detail. The kappa(epsilon)-Ga2O3 layers were deposited by the halide vapor phase epitaxy on patterned GaN templates with sapphire substrates. The spectral dependencies of the photoelectric properties of structures were analyzed in the wavelength interval 200-370 nm. The maximum photo to dark current ratio, responsivity, detectivity and external quantum efficiency of structures were determined as: 180.86 arb. un., 3.57 A/W, 1.78 x 10(12) Hz(0.5)center dot cm center dot W-1 and 2193.6%, respectively, at a wavelength of 200 nm and an applied voltage of 1 V. The enhancement of the photoresponse was caused by the decrease in the Schottky barrier at the Pt/kappa(epsilon)-Ga2O3 interface under ultraviolet exposure. The detectors demonstrated could functionalize in self-powered mode due to built-in electric field at the Pt/kappa(epsilon)-Ga2O3 interface. The responsivity and external quantum efficiency of the structures at a wavelength of 254 nm and zero applied voltage were 0.9 mA/W and 0.46%, respectively. The rise and decay times in self-powered mode did not exceed 100 ms.
引用
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页数:7
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共 72 条
[1]   Investigating the effect of self-trapped holes in the current gain mechanism of β-Ga2O3 Schottky diode photodetectors [J].
Akyol, Fatih .
TURKISH JOURNAL OF PHYSICS, 2021, 45 (03) :169-177
[2]   Solar-Blind Ultraviolet Detectors Based on High-Quality HVPE α-Ga2O3 Films With Giant Responsivity [J].
Almaev, Aleksei ;
Nikolaev, Vladimir ;
Kopyev, Viktor ;
Shapenkov, Sevastian ;
Yakovlev, Nikita ;
Kushnarev, Bogdan ;
Pechnikov, Aleksei ;
Deng, Jinxiang ;
Izaak, Tatyana ;
Chikiryaka, Andrei ;
Scheglov, Mikhail ;
Zarichny, Anton .
IEEE SENSORS JOURNAL, 2023, 23 (17) :19245-19255
[3]   High Sensitivity Low-Temperature Hydrogen Sensors Based on SnO2/κ(ε)-Ga2O3:Sn Heterostructure [J].
Almaev, Aleksei ;
Yakovlev, Nikita ;
Kopyev, Viktor ;
Nikolaev, Vladimir ;
Butenko, Pavel ;
Deng, Jinxiang ;
Pechnikov, Aleksei ;
Korusenko, Petr ;
Koroleva, Aleksandra ;
Zhizhin, Evgeniy .
CHEMOSENSORS, 2023, 11 (06)
[4]   Gas Sensors Based on Pseudohexagonal Phase of Gallium Oxide [J].
Almaev, Aleksei ;
Nikolaev, Vladimir ;
Butenko, Pavel ;
Stepanov, Sergey ;
Pechnikov, Aleksei ;
Yakovlev, Nikita ;
Sinyugin, Igor ;
Shapenkov, Sevastian ;
Scheglov, Mikhail .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2022, 259 (02)
[5]   Role of self-trapped holes in the photoconductive gain of β-gallium oxide Schottky diodes [J].
Armstrong, Andrew M. ;
Crawford, Mary H. ;
Jayawardena, Asanka ;
Ahyi, Ayayi ;
Dhar, Sarit .
JOURNAL OF APPLIED PHYSICS, 2016, 119 (10)
[6]   High responsivity solar-blind metal-semiconductor-metal photodetector based on α-Ga2O3 [J].
Bae, Jinho ;
Jeon, Dae-Woo ;
Park, Ji-Hyeon ;
Kim, Jihyun .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2021, 39 (03)
[7]   Thermodynamically metastable α-, ε- (or κ-), and γ-Ga2O3: From material growth to device applications [J].
Biswas, Mahitosh ;
Nishinaka, Hiroyuki .
APL MATERIALS, 2022, 10 (06)
[8]   Hetero-epitaxy of ε-Ga2O3 layers by MOCVD and ALD [J].
Boschi, F. ;
Bosi, M. ;
Berzina, T. ;
Buffagni, E. ;
Ferrari, C. ;
Fornari, R. .
JOURNAL OF CRYSTAL GROWTH, 2016, 443 :25-30
[9]   A Metal-Oxide Contact to ε-Ga2O3 Epitaxial Films and Relevant Conduction Mechanism [J].
Bosio, Alessio ;
Borelli, Carmine ;
Parisini, Antonella ;
Pavesi, Maura ;
Vantaggio, Salvatore ;
Fornari, Roberto .
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2020, 9 (05)
[10]   Tin-assisted growth of ε-Ga2O3 film and the fabrication of photodetectors on sapphire substrate by PLD [J].
Cai, Yuncong ;
Zhang, Ke ;
Feng, Qian ;
Zuo, Yan ;
Hu, Zhuangzhuang ;
Feng, Zhaoqing ;
Zhou, Hong ;
Lu, Xiaoli ;
Zhang, Chunfu ;
Tang, Weihua ;
Zhang, Jincheng ;
Hao, Yue .
OPTICAL MATERIALS EXPRESS, 2018, 8 (11) :3506-3517