Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma

被引：0
作者：
Murin, D.B. [1 ]
Grazhdyan, A. Yu. [1 ]
Chesnokov, I.A. [1 ]
Gogulev, I.A. [1 ]
机构：
[1] Ivanovo State University of Chemical Technology, Ivanovo
来源：
Russian Microelectronics | 2024年 / 53卷 / 03期
关键词：
electrophysical parameters; gas temperature; glow discharge; plasma; radiation intensity; radiation spectra; reduced electric field strength; specific power; tetrafluoromethane;
D O I：
10.1134/S1063739724600183
中图分类号：
学科分类号：
摘要：
The influence of the addition of hydrogen on the electrophysical parameters and emission spectra of tetrafluoromethane under conditions of a direct current glow discharge is studied. It is established that the gas temperature changes nonlinearly with an increasing proportion of hydrogen in the plasma-forming mixture. The emission spectra of tetrafluoromethane plasma with hydrogen are obtained and analyzed. It is shown that plasma radiation is represented by atomic and molecular components, and the dependencies of the line radiation intensities on the external conditions of the discharge are determined by the excitation of emitting states during direct electron impacts. © Pleiades Publishing, Ltd. 2024.
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页码：245 / 251
页数：6
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