Application of Cerium Oxide Nanopowders for Silicon Polishing

被引：0

作者：

Chkhalo, N. I. ^{[1
]}

Akhsakhalyan, A. A. ^{[1
]}

Vainer, Yu. A. ^{[1
]}

Zorina, M. V. ^{[1
]}

Pestov, A. E. ^{[1
]}

Svechnikov, M. V. ^{[1
]}

Toropov, M. N. ^{[1
]}

Kumar, N. ^{[1
]}

Tokunov, Yu. M. ^{[2
]}

机构：

[1] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 607680, Russia

[2] MIPT, Dolgoprudnyi 141701, Moscow Oblast, Russia

来源：

TECHNICAL PHYSICS | 2024年 / 69卷 / 04期

关键词：

surface; roughness; X-ray optics; deep grinding-polishing; X-RAY-SCATTERING; SURFACES;

D O I：

10.1134/S106378422403006X

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The research methods and the first results obtained in the study of the roughness of single-crystal silicon (111) substrates processed at the final stage by various methods are described: traditional polishing without the use of chemical-mechanical polishing (CMP), with the use of CMP and without CMP, but with the use of oxide cerium nanopowders. The efficiency of using CeO2 nanopowders has been demonstrated. The following effective roughness values were obtained: without CMP-3.56 nm, with CMP-0.54 nm, and without CMP, but with CeO2 polishing-0.93 nm.

引用

页码：824 / 832

页数：9

共 50 条

[31] Tuning the selectivity of cerium oxide for ethanol dehydration to ethylene [J].

Salcedo, Agustin ;

Poggio-Fraccari, Eduardo ;

Marino, Fernando ;

Irigoyen, Beatriz .

APPLIED SURFACE SCIENCE, 2022, 599

[32] Controlling diameter in cerium oxide nanowires obtained by electrospinning [J].

Leao, Joyce de M. ;

Yokaichiya, Fabiano ;

Mattoso, Ney ;

Viana, Emilson R. ;

Saul, Cyro K. ;

Ribeiro, Evaldo .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2024, 130 (05)

[33] Fabrication of cerium oxide films with thickness and hydrophobicity gradients [J].

Zhu, Dapeng ;

Hu, Chenglong ;

Zhao, Rongzhi ;

Tan, Xiangyang ;

Li, Yixing ;

Mandic, Vilko ;

Shi, Zhen ;

Zhang, Xuefeng .

SURFACE & COATINGS TECHNOLOGY, 2022, 430

[34] A resonant photoemission applied to cerium oxide based nanocrystals [J].

Matolin, V. ;

Matolinova, I. ;

Sedlacek, L. ;

Prince, K. C. ;

Skala, T. .

NANOTECHNOLOGY, 2009, 20 (21)

[35] Synthesis of ultrasmall cerium oxide nanoparticles in deep eutectic solvent and their application in an electrochemical sensor to detect dopamine in biological fluid [J].

Gomes-Junior, Paulo Cardoso ;

Longatto, Gustavo Patelli ;

Augusto, Karen Kenlderi de Lima ;

Rocha, Josias da Silveira ;

Piccin, Evandro ;

Fatibello-Filho, Orlando .

MICROCHIMICA ACTA, 2024, 191 (07)

[36] Electrochemical deposition of cerium on porous silicon to improve photoluminescence properties [J].

Atyaoui, Malek ;

Dimassi, Wissem ;

Monther, Ghrib ;

Chtourou, Radhouane ;

Ezzaouia, Hatem .

JOURNAL OF LUMINESCENCE, 2012, 132 (02) :277-281

[37] The Effects of Cerium Valence States at Cerium Oxide Coatings on the Responses of Bone Mesenchymal Stem Cells and Macrophages [J].

You, Mingyu ;

Li, Kai ;

Xie, Youtao ;

Huang, Liping ;

Zheng, Xuebin .

BIOLOGICAL TRACE ELEMENT RESEARCH, 2017, 179 (02) :259-270

[38] Ultra-low damage processing of silicon wafer with an innovative and optimized nonwoven grind-polishing wheel [J].

Gao, Shang ;

Huang, Jinxing ;

Zhang, Yu ;

Guo, Xiaoguang ;

Kang, Renke .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2024, 88 :884-894

[39] Evaluating the Corrosion Inhibition Performance of Cerium Oxide/Cerium Nitrate Inhibitors on Carbon Steel in Chloride Solutions [J].

Salmi, Safa ;

Boudellioua, Hichem ;

Hamlaoui, Youcef ;

Fedel, Michele .

MATERIALS AND CORROSION-WERKSTOFFE UND KORROSION, 2025,

[40] Selective Polishing of Amorphous Silicon Carbonitride (a-SiCN) Films Over Silicon Dioxide and Silicon Nitride Films for Hardmask Applications [J].

Gowda, Akshay ;

Alety, Sridevi ;

Ranaweera, Charith K. ;

Babu, S., V .

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2020, 9 (03)

← 1 2 3 4 5 →