Shape Modification of Vertical Nanowires under Annealing

被引：0

作者：

Nastovjak, A. G. ^{[1
,2
]}

Shwartz, N. L. ^{[1
,2
]}

机构：

[1] Russian Acad Sci, Rzhanov Inst Semicond Phys, Siberian Branch, Novosibirsk 630090, Russia

[2] Novosibirsk State Tech Univ, Novosibirsk 630073, Russia

来源：

OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING | 2024年 / 60卷 / 02期

关键词：

nanowires; annealing; readsorption;

D O I：

10.3103/S8756699024700262

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The numerical calculation of the shape modification of vertical nanowires under annealing due to the readsorption of the substance evaporated from the neighboring nanowires and substrate was carried out. The calculation was performed by the model of evaporation from a set of spherically symmetric sources and by the Knudsen-Lambert model. The effect produced on the shape of nanowires by the aspect ratio of the nanowire length to the distance between them and the rate of material evaporation from the nanowire side wall and substrate was analyzed.

引用

页码：220 / 228

页数：9