Development of sensor devices using piezoelectric vibration in low frequency ultrasonic region

被引：0

作者：

Fujimoto K. ^{[1
]}

Shiratsuyu K. ^{[1
]}

Yamamoto H. ^{[1
]}

Mitani A. ^{[1
]}

机构：

[1] Murata Manufacturing Co., Ltd., 1-10-1 Higashikotari, Nagaokakyo

来源：

Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy | 2020年 / 67卷 / 09期

关键词：

Gyroscope; Supporting structure; Ultrasonic transducer; Vibration mode;

D O I：

10.2497/JJSPM.67.505

中图分类号：

学科分类号：

摘要：

The sensor devices operated in low frequency ultrasonic region usually contain the piezoelectric element driven by flexure vibration mode. Two successful examples of these devices as piezoelectric vibration gyroscope and SMD type ultrasonic transducer are reviewed. In both cases, reversibility of piezoelectricity has play an important role for simplifying the structure and cost reduction. Designed structure to minimize the leak of vibration generated by flexure vibration is key factor for improved performance and reliability which must be critical in miniature size. © 2020 Japan Society of Powder and Powder Metallurgy.

引用

页码：505 / 509

页数：4