Electrostatic pull-in application in flexible devices: A review

被引：0
作者：
Cai T. [1 ,2 ]
Fang Y. [1 ,2 ]
Fang Y. [1 ,2 ]
Li R. [1 ,2 ]
Yu Y. [1 ,2 ]
Huang M. [1 ,2 ]
机构：
[1] College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing
[2] National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology, Nanjing University of Posts and Telecommunications, Nanjing
来源：
Beilstein Journal of Nanotechnology | 2022年 / 13卷
关键词：
Electrostatics; MEMS; microfluidics; NEM switches; pull-in;
D O I：
10.3762/BJNANO.13.32
中图分类号：
学科分类号：
摘要：
The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted increasing attention due to their unique ductility. This review summarizes nanoelectromechanical switches made by flexible materials and classifies and discusses their applications in, among others, radio frequency systems, microfluidic systems, and electrostatic discharge protection. It is supposed to give researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices. © 2022. Cai et al.; licensee Beilstein-Institut. License and terms: see end of document
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页码：390 / 403
页数：13
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