Research progress of green chemical mechanical polishing slurry

被引：0

作者：

Gao, Pei-Li ^{[1
]}

Zhang, Zhen-Yu ^{[1
]}

Wang, Dong ^{[2
]}

Zhang, Le-Zhen ^{[3
]}

Xu, Guang-Hong ^{[1
]}

Meng, Fan-Ning ^{[1
]}

Xie, Wen-Xiang ^{[1
]}

Bi, Sheng ^{[1
]}

机构：

[1] Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Institute of High Performance Manufacturing, Dalian University of Technology, Dalian,116024, China

[2] Beijing Spacecrafts, China Academy of Space Technology, Beijing,100094, China

[3] Weichai Power Co., Ltd., Weifang,261061, China

来源：

Wuli Xuebao/Acta Physica Sinica | 2021年 / 70卷 / 06期

关键词：

All Open Access; Gold;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

120

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