Mechanically deformable 3D chiral THz metamaterial

被引：0
|
作者：
Kosuge T. [1 ]
Kan T. [1 ]
机构：
[1] University of Electro-Communications, 1-5-1, Chofugaoka, Chofu, Tokyo
来源：
IEEJ Transactions on Sensors and Micromachines | 2020年 / 140卷 / 07期
关键词：
Chiral; Metamaterial; Parylene bonding; Polarizing filter; Spiral; THz;
D O I：
10.1541/IEEJSMAS.140.170
中图分类号：
学科分类号：
摘要：
This paper reports an actuation method of MEMS chiral metamaterial that transforms a two-dimensional MEMS spiral with diameter 150 μm to a three-dimensional spiral by individually pulling the center of spirals. The spiral dimension was designed to work in THz electromagnetic frequency. MEMS spirals were manufactured by bonding the central part of spirals and a Si wafer with Parylene bonding, and were deformed by lifting the Si wafer. It was confirmed that spirals were stably pulled by amplitude of 60 μm at the maximum by relatively separating the spiral and the Si wafer. © 2020 The Institute of Electrical Engineers of Japan.
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页码：170 / 176
页数：6
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