An impedancemetric micro NO2 sensor using oxide and solid-electrolyte thin-films

被引：0
作者：
Sakai T. [1 ]
Takase S. [1 ]
Shimizu Y. [1 ]
机构：
[1] Department of Applied Chemistry, Kyushu Institute of Technology, Kitakyushu
来源：
IEEJ Transactions on Sensors and Micromachines | 2020年 / 140卷 / 11期
基金：
日本学术振兴会;
关键词：
Impedancemetric; La0.8K0.2MnO3; NOx sensor; Perovskite-type oxide; Solid electrolyte; Thin-film;
D O I：
10.1541/ieejsmas.140.305
中图分类号：
学科分类号：
摘要：
A solid-state micro NOX sensor was tried to make using a solid-electrolyte Li1.5Al0.5Ti1.5(PO4)3 (LATP) thin-film as an impedance transducer and a perovskite-type oxide thin-film as a receptor, respectively. The LATP and perovskite-type La0.8K0.2MnO3 oxide thin-films were prepared by wet-chemical methods at 650-800°C. The La0.8K0.2MnO3/LATP thin-film device could work as a good impedancemetric NO2 sensor at 300-500°C. © 2020 The Institute of Electrical Engineers of Japan.
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收藏
页码：305 / 308
页数：3
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