Low-loss tantalum pentoxide photonics with a CMOS-compatible process

被引：5

作者：

Geng, Zhaoting ^{[1
]}

Cheng, Weiren ^{[1
]}

Yan, Zhiwei ^{[2
,3
]}

Yi, Qiyuan ^{[2
,3
]}

Liu, Zhenyu ^{[1
]}

You, Mingjian ^{[1
]}

Yu, Xiaolun ^{[1
]}

Wu, Pengzhuo ^{[1
]}

Ding, Ning ^{[1
]}

Tang, Xingyu ^{[1
]}

Wang, Min ^{[1
]}

Shen, Li ^{[2
,3
]}

Zhao, Qiancheng ^{[1
]}

机构：

[1] Southern Univ Sci & Technol, Engn Res Ctr Integrated Circuits Next Generat Comm, Sch Microelect, MOE, Shenzhen 518000, Guangdong, Peoples R China

[2] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China

[3] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China

来源：

OPTICS EXPRESS | 2024年 / 32卷 / 07期

基金：

中国国家自然科学基金;

关键词：

PLANAR WAVE-GUIDES; REFRACTIVE-INDEX; DIOXIDE; FABRICATION; RESONATORS; MEMORY;

D O I：

10.1364/OE.518545

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report a Ta2O5 photonic platform with a propagation loss of 0.49 dB/cm at 1550 nm, of 0.86 dB/cm at 780 nm, and of 3.76 dB/cm at 2000 nm. The thermal bistability measurement is conducted in the entire C -band for the first time to reveal the absorption loss of Ta2O5 waveguides, offering guidelines for further reduction of the waveguide loss. We also characterize the Ta2O5 waveguide temperature response, which shows favorable thermal stability. The fabrication process temperature is below 350 degrees C, which is friendly to integration with active optoelectronic components.

引用

页码：12291 / 12302

页数：12

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