Creation of Functional Nanostructures under Ion Irradiation

被引：0

作者：

Prikhodko, K. E. ^{[1
,2
]}

Dement'eva, M. M. ^{[1
]}

机构：

[1] Kurchatov Inst, Natl Res Ctr, Moscow 123182, Russia

[2] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia

来源：

TECHNICAL PHYSICS | 2024年 / 69卷 / 04期

关键词：

Ion irradiation; NbN thin superconducting films; integrated cryogenic resistors; creation of dielectric layers under irradiation; NBN; NANOWIRES; FILMS;

D O I：

10.1134/S1063784224030320

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The paper describes a method developed in National Research Centre "Kurchatov Institute" for creating different functional nanostructures using ion beam irradiation. As an example, the formation of an integrated resistive elements in a low-temperature NbN superconductor nanowire is demonstrated. The possibility of producing an insulating layer of aluminum oxide with a thickness of 15 nm on the aluminum surface at room temperature under 0.2 keV oxygen ions irradiation was shown.

引用

页码：1010 / 1015

页数：6

共 12 条

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