Manufacturing Technology of Diffractive Optical Elements Formed by Ultraviolet-Cured Organic-Inorganic Nanocomposites

被引：0

作者：

Wang L. ^{[1
]}

Xue C. ^{[1
]}

Lan X. ^{[1
]}

Li C. ^{[1
]}

Wu B. ^{[1
]}

Jia M. ^{[1
]}

Wang L. ^{[1
]}

机构：

[1] School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun, 130022, Jilin

来源：

Guangxue Xuebao/Acta Optica Sinica | 2019年 / 39卷 / 07期

关键词：

Diffractive optical element; Optical design; Organic-inorganic nanocomposites; Relative errors; Ultraviolet curing;

D O I：

10.3788/AOS201939.0722001

中图分类号：

学科分类号：

摘要：

By considering the limitations of material selection and shielding effect associated with the manufacturing of diffractive optical elements, this study introduces the fabrication of diffractive optical elements based on the rapid prototyping technology of the ultraviolet (UV)-cured organic-inorganic nanocomposites. Thus, we can obtain diffractive optical elements exhibiting a high refractive index and a high dispersion. Further, a composite formulation suitable for manufacturing diffractive optical elements is obtained based on an experiment on the organic-inorganic nanocomposite preparation. The formulation contains aliphatic polyurethane acrylate (2PUA) with mass fraction of 57.97%, pentaerythritol triacrylate (PETA) with mass fraction of 38.64%, photoinitiator 184 (Irgacure 184) with mass fraction of 1.45%, dispersant 163 (Disperbyk 163) with mass fraction of 1.93%, and ITO nanoparticles with controllable mass fraction. Diffractive optical elements are fabricated using this method. The average microstructural height of the mold-core surface of the diffractive optical elements measured using the step instrument is 13.26 μm. Subsequently, we fabricate the UV-cured diffractive optical elements. Further, the average surface microstructural height of the diffraction optical elements using UV-cured organic-inorganic nanocomposites is 12.58 μm. The relative error between the diffraction optical elements and the mold-core microstructures fabricated by the UV-cured organic-inorganic nanocomposites is 5.141%. The manufacturing technology of diffractive optical elements for the UV-cured organic-inorganic nanocomposites overcomes the limitation of material selection and reduces the occlusion error, making it considerably significant for the rapid prototyping of the refractive-diffractive hybrid optical systems in a wide band. © 2019, Chinese Lasers Press. All right reserved.

引用

共 15 条

[1] Li F., Cheng J.G., Wang M.Y., Et al., An amplitude and phase hybrid modulation Fresnel diffractive optical element, Optics Communications, 413, pp. 44-47, (2018)
[2] Gao L., To S., Yang H.F., Et al., Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements, Applied Optics, 53, 31, pp. 7341-7347, (2014)
[3] Herrera-Fernandez J.M., Sanchez-Brea L.M., Double diffractive optical element system for near-field shaping, Applied Optics, 50, 23, pp. 4587-4593, (2011)
[4] Fujikawa K., Hirakawa G., Shiono T., Et al., Optical properties of a Si binary optic microlens for infrared ray, Proceedings IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems, pp. 360-365, (1997)
[5] Beretta S., Cairoli M.M., Viardi M., Optimum design of phase gratings for diffractive optical elements obtained by thin-film deposition, Proceedings of SPIE, 1544, pp. 2-9, (1991)
[6] Xue C.X., Cui Q.F., Yang L.L., Et al., Design and analysis of multi-layer diffractive optical elements with Cauchy dispersion formula, Acta Optica Sinica, 31, 6, (2011)
[7] Ma Z.B., Kang F.Z., Wang H., Effect of fabrication errors of double-layer BOE on diffractive efficiency, Infrared and Laser Engineering, 45, 9, (2016)
[8] Yoo S., Song H.Y., Lee J., Et al., Cost-effective large-scale fabrication of diffractive optical elements by using conventional semiconducting processes, Applied Optics, 51, 33, pp. 8052-8056, (2012)
[9] Xue C.X., To S., Analysis of materials selected for multilayer diffractive optical elements, Optik, 125, 13, pp. 3245-3248, (2014)
[10] Liu X., Zhang M., Pang H., Et al., Fabrication of large-angle diffractive optical element based on nanoimprint lithography, Acta Photonica Sinica, 45, 6, (2016)

← 1 2 →