Influence of sapphire substrate miscut on the surface morphology and microstructure of AlN films grown by HVPE

被引：0
|
作者：
Di Li, Di [1 ,2 ]
Jun Su, Xu [1 ]
Jing Chen, Jing [1 ]
Hua Wang, Lu [1 ]
Huang, Jun [1 ]
Tong Niu, Mu [1 ]
Wang, Xiaodan [4 ]
Zeng, Xionghui [1 ]
Xu, Ke [1 ,2 ,3 ,5 ]
机构：
[1] Suzhou Institute of Nano-tech and Nano-bionics, CAS, Ruoshui Road 398, Suzhou Industrial Park, Suzhou,215123, China
[2] School of Physical Science and Technology, ShanghaiTech University, Shanghai,201210, China
[3] Shenyang National Laboratory for Materials Science, Jiangsu Institute of Advanced Semiconductors, NW-20, Nanopolis Suzhou, 99, Jinji Lake Avenue, Suzhou Industrial Park, Jiangsu Province, China
[4] Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou,215009, China
[5] Suzhou Nanowin Science and Technology Co. Ltd., Suzhou,215123, China
来源：
Journal of Crystal Growth | 2022年 / 592卷
关键词：
Compendex;
D O I：
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学科分类号：
摘要：
Thick films
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