Preparation and optical properties of siox thin films using different reactive magnetron sputtering technology

被引：0
|
作者：
Chen, Q.F. [1 ,2 ]
Li, Y.Y. [1 ,2 ]
Ying, P.Y. [1 ,2 ]
Wang, T.L. [1 ,2 ]
Zhang, P. [1 ,2 ]
Wu, J.B. [1 ,2 ]
Huang, M. [1 ,2 ]
Fang, Y.H. [1 ,2 ]
Levchenko, V. [1 ,2 ]
机构：
[1] [1,Chen, Q.F.
[2] 1,Li, Y.Y.
[3] 1,Ying, P.Y.
[4] 1,Wang, T.L.
[5] 1,Zhang, P.
[6] 1,Wu, J.B.
[7] 1,Huang, M.
[8] 1,Fang, Y.H.
[9] 1,Levchenko, V.
来源：
Zhang, P. (zhangp03@126.com); Zhang, P. (zhangp03@126.com) | 1600年 / National Institute of Optoelectronics卷 / 14期
关键词：
Refractive index;
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页码：9 / 10
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